PEGASUS™ A200
자동 프로브 스테이션: 최대 200 mm 웨이퍼용
| 주요기능
• Automatic wafer handling, pattern recognition and probing
• High throughput cassette to cassette automation
• Wafer pre-alignment and detection
• Handling capabilities for a variety of materials such as GaN, GaAs, saw frames and thin wafers
• Configurable to high voltages in excess of 5 kV for specialized applications
• Optional thermal chuck capability
| 응용분야
• High volume, high throughput
• Special handling applications such as GaAs, GaN, saw frames and thin wafers
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